Mass Spectrometric and Langmuir Probe Measurements in Inductively Coupled Plasmas in Ar, CHF3/Ar and CHF3/Ar/O2 Mixtures

Mass Spectrometric and Langmuir Probe Measurements in Inductively Coupled Plasmas in Ar, CHF3/Ar and CHF3/Ar/O2 Mixtures

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Product Description

Mass Spectrometric and Langmuir Probe Measurements in Inductively Coupled Plasmas in Ar, CHF3/Ar and CHF3/Ar/O2 Mixtures

Technical Specifications

Country
USA
Brand
Bibliogov
Manufacturer
Bibliogov
Binding
Paperback
Height
9.69
Length
7.44
Weight
0.16975594174
Width
0.07
NumberOfItems
1