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Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28)
Product ID: 0819430528
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Product Description
Lithography Process Control (SPIE Tutorial Texts in Optical Engineering Vol. TT28)
Covers lithography process control at several levels, from fundamental through advanced topics. Self-contained tutorial works both as an introduction to the technology and as a reference for the experienced lithographer. Reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback.
Contents
- Preface
- Introduction to the use of statistical process control in lithography
- Sampling
- Simple and complex processes
- Linewidth control
- Overlay
- Yield
- Process drift and automatic process control
- Metrology
- Control of operations
Technical Specifications
Country
USA
Brand
Wiley
Manufacturer
SPIE Publications
Binding
Paperback
Height
10.25
Length
7.25
Weight
0.95019234922
Width
0.5
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