An Introduction to Microelectromechanical Systems Engineering

An Introduction to Microelectromechanical Systems Engineering

Product ID: 0890065810 Condition: New

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Product Description

An Introduction to Microelectromechanical Systems Engineering

  • Used Book in Good Condition

Provides a nontechnical introduction to the exciting field of micro-electromechanical systems (MEMS) that describe in detail the materials used in producing MEMS-including silicon, polymers, and glass and quartz substrates-as well as MEMS design and fabrication for nozzles, pressure and inertial sensors, valves, displays, and other applications. DLC: Microelectromechanical systems.

Technical Specifications

Country
USA
Brand
Artech House
Manufacturer
Artech House Publishers
Binding
Hardcover
Height
9.29
Length
6.33
Weight
1.3999353637
Width
0.95
NumberOfItems
1